GUARD STRUCTURE FOR SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING GUARD LAYOUT PATTERN FOR SEMICONDUCTOR LAYOUT PATTERN

摘要

A guard structure for a semiconductor structure is provided. The guard structure includes a first guard ring, a second guard ring and a third guard ring. The first guard ring has a first conductivity type. The second guard ring has a second conductivity type, and surrounds the first guard ring. The third guard ring has the first conductivity type, and surrounds the second guard ring, wherein the first, the second and the third guard rings are grounded. A method of forming a guard layout pattern for a semiconductor layout pattern is also provided.

主权项

1. A guard structure for a semiconductor structure, comprising:
a first guard ring having a first conductivity type; a second guard ring having a second conductivity type, and surrounding the first guard ring; and a third guard ring having the first conductivity type, and surrounding the second guard ring, wherein the first, the second and the third guard rings are grounded.