LOWER ELECTRODE AND MANUFACTURING METHOD THEREOF

摘要

The present invention relates to the field of dry etching. Provided are a lower electrode and a manufacturing method thereof, which can solve the problem in the prior art that ceramic points easily fall off from ceramic layers due to a low bonding strength caused by the fact that the ceramic points and the ceramic layers of the lower electrode are formed through different procedures. The lower electrode (1) comprises a metal substrate (2) and an insulating layer (5), the metal substrate (2) comprising a substrate body (21) and projecting portions (22) on an upper surface of the substrate body (21); the insulating layer covers the upper surface of the substrate body and the projecting portions on the upper surface of the substrate body, thus forming projecting insulating points (51) at the projecting portions. The present invention is suitable for design and fabrication of parts of an etching device.