发明名称 ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING ACOUSTIC WAVE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an acoustic wave device capable of electrically protecting a functional part, and a method for manufacturing the acoustic wave device.SOLUTION: There is provided an acoustic wave device including: a piezoelectric substrate 10; an IDT 24 provided on the top face of the piezoelectric substrate 10; a signal wire 16a provided on the top face of the piezoelectric substrate 10 and electrically connected to the IDT 24; a metal wall 12 provided on the top face of the piezoelectric substrate 10, in contact with the signal wire 16a and completely surrounding the IDT 24; a ceiling 14 provided on the IDT 24 so that a sealed gap 21 is formed on the IDT 24, electrically connected to the metal wall 12, supported by the metal wall 12 and formed of metal; and a cover part 20 provided on the ceiling 14 and covering the IDT 24. There is also provided a method for manufacturing the acoustic wave device.
申请公布号 JP2014158100(A) 申请公布日期 2014.08.28
申请号 JP20130026996 申请日期 2013.02.14
申请人 TAIYO YUDEN CO LTD 发明人 TANAKA TABITO
分类号 H03H9/25;H03H3/08;H03H9/64 主分类号 H03H9/25
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