摘要 |
PROBLEM TO BE SOLVED: To provide an acoustic wave device capable of electrically protecting a functional part, and a method for manufacturing the acoustic wave device.SOLUTION: There is provided an acoustic wave device including: a piezoelectric substrate 10; an IDT 24 provided on the top face of the piezoelectric substrate 10; a signal wire 16a provided on the top face of the piezoelectric substrate 10 and electrically connected to the IDT 24; a metal wall 12 provided on the top face of the piezoelectric substrate 10, in contact with the signal wire 16a and completely surrounding the IDT 24; a ceiling 14 provided on the IDT 24 so that a sealed gap 21 is formed on the IDT 24, electrically connected to the metal wall 12, supported by the metal wall 12 and formed of metal; and a cover part 20 provided on the ceiling 14 and covering the IDT 24. There is also provided a method for manufacturing the acoustic wave device. |