System for and Method of Multiple Channel Fast Pulse Gas Delivery

摘要

A system and method are configured to deliver pulses of desired mass of gases. The system delivers a plurality of sequences of pulses of a desired mass of gas through at least two flow channels. The system comprises: a multi-channel fast pulse gas delivery system including (a) a plurality of flow channels, each channel comprising a flow sensor and a control valve, and (b) a dedicated controller configured and arranged to receive a recipe of one or more sequences of steps for opening and closing at least some of the control valves so as to deliver as a sequence of pulses of at least one gas through each of the corresponding channels as a function of the recipe. The method comprises: receiving at a dedicated controller from a host computer the prescribed recipe of one or more sequences of steps of pulses of one or more gases to be delivered through the plurality of flow channels; and using the sequence of steps to control each flow channel including a flow sensor and a control valve by opening and closing the control valve of each flow channel in accordance with the sequence of steps of the recipe.

主权项

1. A system for delivering a plurality of sequences of pulses of a desired mass of gases through at least two flow channels, the system comprising:
a multi-channel fast pulse gas delivery system including (a) a plurality of flow channels, each channel comprising a flow sensor and a control valve, and (b) a dedicated controller configured and arranged to receive a recipe of one or more sequences of steps for opening and closing at least some of the control valves so as to deliver as a sequence of pulses of at least one gas through each of the corresponding channels as a function of the recipe.