| 摘要 |
PROBLEM TO BE SOLVED: To support, at the time of cleaning a plate-like workpiece, the plate-like workpiece in accordance with pressing force of cleaning means applied to the plate-like workpiece.SOLUTION: A support table 13 provided on a spinner cleaning device 10 comprises: a support area 131 for supporting a plate-like workpiece W on an outer peripheral side of a spinner table 11; and a fluid support area 133 for supporting the plate-like workpiece W by forming a layer of fluid. At the time of cleaning the plate-like workpiece W by cleaning means 15, if it is recognized by a recognition unit 30 that a scrubbing brush 150 constituting the cleaning means 15 is passing above the fluid support area 133 of the support table 13, a predetermined amount of fluid is made to flow out from an outlet 134 in the fluid support area 133. This causes a fluid layer 20 to be formed between a lower surface Wb of the plate-like workpiece W and the fluid support area 133 so that only an outer peripheral area W2 of the plate-like workpiece W is supported by the fluid layer 20. As a result, cracking may be prevented on the plate-like workpiece W. |
