ELECTROMECHANICAL CONVERSION ELEMENT, DROPLET DISCHARGE HEAD, AND IMAGE FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an electromechanical conversion element that suppresses a deviation in composition ratio of a ferroelectric film and has good in-plane uniformity, a droplet discharge head including the electromechanical conversion element, and an image forming apparatus. ! SOLUTION: An electromechanical conversion element 18 includes: a diaphragm 12; an adhesion layer 13; a lower electrode 14 comprising a two-layer structure having a Pt metal layer 14a and a SRO(SrRuO3) composite oxide layer 14b; a seed layer 15 comprising RST(PbSrTiO3); a ferroelectric layer 16 comprising PZT(PbZrTiO3); and an upper electrode 17 comprising pt, which are sequentially laminated on a substrate 11. ! COPYRIGHT: (C)2014,JPO&INPIT