| 发明名称 |
FRACTAL STRUCTURES FOR FIXED MEMS CAPACITORS |
| 摘要 |
An embodiment of a fractal fixed capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure. The capacitor body has a first plate with a fractal shape separated by a horizontal distance from a second plate with a fractal shape. The first plate and the second plate are within the same plane. Such a fractal fixed capacitor further comprises a substrate above which the capacitor body is positioned. |
| 申请公布号 |
US2014239446(A1) |
申请公布日期 |
2014.08.28 |
| 申请号 |
US201214239234 |
申请日期 |
2012.08.17 |
| 申请人 |
King Abdullah University of Science and Technology |
发明人 |
Elshurafa Amro M.;Radwan Ahmed Gomaa Ahmed;Emira Ahmed A.;Salama Khaled Nabil |
| 分类号 |
H01L49/02 |
主分类号 |
H01L49/02 |
| 代理机构 |
|
代理人 |
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| 主权项 |
1. A fixed capacitor comprising:
a capacitor body in a microelectromechanical system (MEMS) structure, wherein the capacitor body has a first plate with a fractal shape separated by a horizontal distance from a second plate with a fractal shape, wherein the first plate and the second plate are within the same plane; and a substrate above which the capacitor body is positioned. |
| 地址 |
Thuwal SA |
