| 摘要 |
PURPOSE: A boat for supporting a substrate and a support unit using the same are provided to prevent the substrate from sloping by uniformly supporting the entire surface of the substrate using a number of first and second supporting pins. CONSTITUTION: A pair of main bars(161) is faced each other. A plurality of connecting bars(171) mutually connect the pair of main bars. A number of first supporting pins are installed on the main bar. A substrate is mounted on the first supporting pins. An arc shaped supporting piece is formed on the one end part of the main bar in the shape of a half circle. |
