发明名称 3-DIMENSIONAL NON-VOLATILE MEMORY DEVICE INCLUDING A SELECTION GATE HAVING AN L SHAPE
摘要 A 3-dimensional (3-D) non-volatile memory device includes a first channel protruding from a substrate, a selection gate formed on sidewalls of the first channel and in an L shape, and a gate insulating layer interposed between the first channel and the selection gate and surrounding the first channel. A method of manufacturing a 3-D non-volatile memory device includes forming first channels protruding from a substrate, forming a first gate insulating layer surrounding the first channels, and forming first selection gates having an L shape on sidewalls of the first channels on which the first gate insulating layers are formed.
申请公布号 US2014242765(A1) 申请公布日期 2014.08.28
申请号 US201414272056 申请日期 2014.05.07
申请人 SK hynix Inc. 发明人 LEE Ki Hong;PYI Seung Ho;SHIN Sung Chul
分类号 H01L27/115 主分类号 H01L27/115
代理机构 代理人
主权项
地址 Gyeonggi-do KR