PATTERN INSPECTION METHOD AND PATTERN INSPECTION APPARATUS

摘要

A pattern inspection method includes acquiring an image of a pattern in a stripe region concerned, regarding each of stripe regions of the first group each not including an adjacent stripe region in plural stripe regions obtained by virtually dividing an inspection region of a target object on which patterns have been formed into the plural stripe regions each partially overlapping an adjacent stripe region, wherein the acquiring is performed using laser lights or electron beams, in a longitudinal direction of the stripe region of the first group, and acquiring an image of a pattern in a stripe region concerned, regarding each of stripe regions of the second group each not including an adjacent stripe region, in remaining stripe regions other than the first group stripe regions, wherein the acquiring is performed using laser lights or electron beams, in the longitudinal direction of the stripe region of the second group.

主权项

1. A pattern inspection method comprising:
acquiring an image of a figure pattern arranged in a stripe region concerned, with respect to each of stripe regions of a first group each not including an adjacent stripe region in a plurality of stripe regions obtained by virtually dividing an inspection region of a target object on which a plurality of figure patterns have been formed into the plurality of stripe regions each having a strip shape and overlapping a part of an adjacent stripe region, wherein the acquiring is performed using one of a laser light and an electron beam, in a longitudinal direction of the stripe region concerned of the first group; and acquiring, after the acquiring the image of the figure pattern has been completed for all of the stripe regions of the first group, an image of a figure pattern arranged in a stripe region concerned, with respect to each of stripe regions of a second group each not including an adjacent stripe region, in remaining stripe regions other than the stripe regions of the first group in the plurality of stripe regions, wherein the acquiring is performed using one of the laser light and the electron beam, in the longitudinal direction of the stripe region concerned of the second group.