| 发明名称 |
ELECTRICAL FUSES AND METHODS OF MAKING ELECTRICAL FUSES |
| 摘要 |
A fuse, a method of making the fuse and a circuit containing the fuse. The fuse includes an electrically conductive and conformal liner on sidewalls and the bottom of a trench; a copper layer on the conformal liner, a first thickness of the copper layer over the bottom of the trench in a lower portion of the trench greater than a second thickness of the copper layer over the sidewalls of the trench in an abutting upper portion of the trench; and a dielectric material on the copper layer in the trench, the dielectric material filling remaining space in the upper portion of said trench. |
| 申请公布号 |
US2014239439(A1) |
申请公布日期 |
2014.08.28 |
| 申请号 |
US201313774373 |
申请日期 |
2013.02.22 |
| 申请人 |
CORPORATION INTERNATIONAL BUSINESS MACHINES |
发明人 |
Hogle Nicholas R.;Li Baozhen;Wong Keith Kwong Hon;Yang Chih-Chao |
| 分类号 |
H01L23/525 |
主分类号 |
H01L23/525 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A structure, comprising:
a trench formed in a dielectric layer; and a fuse comprising:
an electrically conductive and conformal liner on sidewalls and the bottom of said trench;a copper layer on said conformal liner, a first thickness of said copper layer over said bottom of said trench in a lower portion of said trench greater than a second thickness of said copper layer over said sidewalls of said trench in an abutting upper portion of said trench; anda dielectric material on said copper layer in said trench, said dielectric material only in said trench and filling remaining space in said upper portion of said trench. |
| 地址 |
US |
