发明名称 METHOD FOR MANUFACTURING SINGLE CRYSTAL
摘要 According to the present invention, there is provided a method for manufacturing single crystal based on a Czochralski method, including: analyzing Ni concentration in at least one of graphite components used in a furnace in which the single crystal is manufactured; and manufacturing the single crystal using the at least one of the graphite components when the analyzed Ni concentration is 30 ppb or less. As a result, in manufacture of the single crystal based on the Czochralski method, the method that enables manufacturing high-quality single crystal in which a reduction in LT (Life Time) or an LPD (Light Point Defect) abnormality does not occur can be provided.
申请公布号 US2014238292(A1) 申请公布日期 2014.08.28
申请号 US201214350269 申请日期 2012.10.02
申请人 SHIN-ETSU HANDOTAI CO., LTD. 发明人 Iwasaki Atsushi
分类号 C30B15/00 主分类号 C30B15/00
代理机构 代理人
主权项
地址 Tokyo JP