SUBSTRATE PROCESSING APPARATUS, SIMULATION DEVICE, PROGRAM, AND SIMULATION METHOD

摘要

PROBLEM TO BE SOLVED: To perform a simulation in which the state of a gas flowchart for a recipe or the state of a process being performed is realized in detail.SOLUTION: The simulation device of a substrate processing apparatus includes: an information acquisition unit for acquiring gas flow information defined by an operation mode of processing the substrate; a route determination unit for determining the route of the gas on the basis of the gas flow information acquired by the information acquisition unit; and a simulation unit for simulating the gas flow by coloring the gas route determined by the route determination unit in a color defined in response to the type of the gas.