| 发明名称 |
COATING APPARATUS AND COATING METHOD |
| 摘要 |
A coating apparatus including a coating nozzle configured to apply a coating liquid to a substrate, and a gas supply part configured to supply a temperature control gas which controls an ejection direction of the coating liquid to the substrate. |
| 申请公布号 |
US2014242284(A1) |
申请公布日期 |
2014.08.28 |
| 申请号 |
US201414188195 |
申请日期 |
2014.02.24 |
| 申请人 |
Tokyo Ohka Kogyo Co., Ltd. |
发明人 |
Shimai Futoshi;Sato Akihiko;Maruyama Kenji;Hosoda Hiroshi;Chiba Masaki |
| 分类号 |
B05B3/04;B05B9/00;B05D1/02 |
主分类号 |
B05B3/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A coating apparatus comprising:
a coating nozzle configured to apply a coating liquid to a substrate, and a gas supply part configured to supply a temperature control gas which controls an ejection direction of the coating liquid to the substrate. |
| 地址 |
Kawasaki-shi JP |
