| 发明名称 |
ELECTROSTATIC CHUCK, RETICLE, AND ELECTROSTATIC CHUCK METHOD |
| 摘要 |
According to one embodiment, an electrostatic chuck is capable of holding a reticle by electrostatic attraction force. The reticle has a planar external shape of a rectangle or a square. The electrostatic chuck includes: a first attraction unit capable of attracting the reticle by the electrostatic attraction force; and a substrate supporting the first attraction unit. The first attraction unit is symmetrical with respect to a first line when the reticle is attracted to the first attraction unit. The first line crosses two opposing sides of the rectangle or the square. |
| 申请公布号 |
US2014240892(A1) |
申请公布日期 |
2014.08.28 |
| 申请号 |
US201313948316 |
申请日期 |
2013.07.23 |
| 申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
OKAMOTO Yosuke;KOMINE Nobuhiro |
| 分类号 |
H01L21/683 |
主分类号 |
H01L21/683 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An electrostatic chuck capable of holding a reticle by electrostatic attraction force, the reticle having a planar external shape of a rectangle or a square, the electrostatic chuck comprising:
a first attraction unit capable of attracting the reticle by the electrostatic attraction force; and a substrate supporting the first attraction unit, the first attraction unit being symmetrical with respect to a first line when the reticle is attracted to the first attraction unit, the first line crossing two opposing sides of the rectangle or the square. |
| 地址 |
Minato-ku JP |
