Device for opening casing of reticle utilized for manufacturing e.g. nano structures, has ventilation device that is arranged with gas supply for pumping gas through set of openings into interior space of reticle casing

摘要

The device has a ventilation device that is connected to a set of gas permeable openings (5) of a reticle casing (2). The ventilation device is arranged with a gas supply for pumping gas e.g. nitrogen, through the set of openings into an interior space (6) of the reticle casing. The reticle casing is arranged with a bottom plate (3) and a lid (4). The interior space is arranged to enclose the gas permeable openings of the reticle casing. A support is arranged for the bottom plate, and another support is arranged for the lid. An independent claim is also included for a method for opening a reticle casing.