| 摘要 |
PROBLEM TO BE SOLVED: To provide a resist stripper composition having high strippability for a resist and excellent liquid stability. ! SOLUTION: The resist stripper composition contains the following (A)-(E) components: quaternary ammonium hydroxide as the (A) component; alkali metal hydroxide as the (B) component; alkanolamine as the (C) component; a compound represented by the specified general formula (1) and/or a salt thereof as the (D) component; and a compound represented by the specified general formula (2) as the (E) component. ! COPYRIGHT: (C)2014,JPO&INPIT |
