| 摘要 |
<p>Provided is a flow control device which can control a flow rate of a high-pressure fluid without needing a pneumatic pressure supplying apparatus having an expensive pressure controller. The flow control device comprises a valve body (19) which accesses or is separated from a valve seat (18) in order to close or open a fluid passage; a spring (21) for providing the valve body with biasing force in the direction of accessing the valve seat (18); a diaphragm (20) which is fixed to an end part of the valve body (19) and has a fluid contact surface (20a) getting in contact with a fluid flowing in the fluid passage and a rear surface (20b) which does not get in contact with the fluid; a pressure chamber (24) to which compressed air is supplied from the outside; and a piston (25) for transferring pressure of the compressed air supplied to the pressure chamber (24) to the rear surface (20b) of the diaphragm (20), wherein an area of a part which receives pressure of the compressed air of the piston (25) is more than twice of an area of the fluid contact surface (20a) of the diaphragm (20).</p> |
