发明名称 |
SEMICONDUCTOR DEVICE AND DISPLAY MODULE |
摘要 |
PROBLEM TO BE SOLVED: To improve element characteristics and improve reliability of an element even when a semiconductor layer is formed on a gate electrode layer, a source electrode layer, and a drain electrode layer.SOLUTION: A structure comprises: a gate electrode layer; a gate insulating layer provided over the gate electrode layer; a source electrode layer and a drain electrode layer provided to overlap a portion of the gate electrode layer through the gate insulating layer; and a semiconductor layer provided over the gate insulating layer, the source electrode layer and the drain electrode layer. In the structure, film thickness of the gate insulating layer located in a region between the source electrode layer and the drain electrode layer is set smaller than film thickness of the gate insulating layer provided between the gate electrode layer and the source electrode layer and film thickness of the gate insulating layer provided between the gate electrode layer and the drain electrode layer. |
申请公布号 |
JP2014158030(A) |
申请公布日期 |
2014.08.28 |
申请号 |
JP20140047189 |
申请日期 |
2014.03.11 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
AKIMOTO KENGO;TSUBUKI MASASHI |
分类号 |
H01L29/786;G02F1/1368;G09F9/30;H01L21/28;H01L21/336;H01L51/50;H05B33/06;H05B33/14 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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