METHOD OF MANUFACTURING A COLOR FILTER

摘要

A color filter is manufactured on each of a plurality of light-receiving elements of an RGB sensor using a plurality of kinds of light-transmitting films having different transmission colors. In such a case, the light-transmitting film that is to be coated next does not uniformly spread across the entire semiconductor wafer, and coating nonuniformities readily occur when a pattern of the light-transmitting film formed earlier on a certain optical element has a right angle portion. In order to solve this problem, the pattern of the light-transmitting film formed earlier has a planar shape having corner-cut portions so that right angle portions do not occur.

主权项

1. A method of forming a color filter comprising:
coating a first photosensitive layer over a substrate, wherein the first photosensitive layer includes a first pigment; placing a first photomask over the first photosensitive layer; selectively exposing the first photosensitive layer; developing the first photosensitive layer with a developing fluid to remove a portion of the first photosensitive layer and form a first light-transmitting layer having corner-cut portions; and coating a second photosensitive layer over the substrate, wherein the second photosensitive layer includes a second pigment, and coating the second photosensitive layer is performed after developing the first photosensitive layer.