| 摘要 |
PROBLEM TO BE SOLVED: To provide an acoustic wave element having an aluminum (Al) electrode for obtaining an electromechanical coupling coefficient k<SP>2</SP>and reflectance of the same level as copper (Cu), and to simplify the process of manufacturing the acoustic wave element. SOLUTION: The acoustic wave element includes: a piezoelectric substrate 11; an IDT electrode 12 disposed on the piezoelectric substrate 11 and including aluminum or an alloy whose main component is aluminum; a sound speed adjusting member 14 disposed between electrodes of the IDT electrode 12 or at the upper part between the electrodes and having a sound speed slower than that of aluminum; and an insulating film 13 covering the IDT electrode 12 and the sound speed adjusting member 14. COPYRIGHT: (C)2011,JPO&INPIT |
