发明名称 METHOD FOR PRODUCING AN ORGANISED NETWORK OF SEMICONDUCTOR NANOWIRES MADE OF ZNO
摘要 <p>A method of forming an organized network of ZnO nanowires including the steps of obtaining, on a substrate, a ZnO layer of Zn polarity, by epitaxial growth at low temperature, advantageously in the range from 400° C. to 650° C., and advantageously in the presence of dioxygen (O2); forming, on this layer, a mask provided with openings for the subsequent growth of nanorods; epitaxially growing ZnO nanorods.</p>
申请公布号 EP2769416(A2) 申请公布日期 2014.08.27
申请号 EP20120787788 申请日期 2012.10.19
申请人 COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES 发明人 THIERRY, ROBIN;FERRET, PIERRE;LAFOSSAS, MATTHIEU;PERILLAT-MERCEROZ, GUILLAUME
分类号 H01L29/22;B82Y10/00;B82Y30/00;B82Y40/00;H01L21/02;H01L29/06;H01L33/00;H01L33/18 主分类号 H01L29/22
代理机构 代理人
主权项
地址