发明名称 |
METHOD FOR PRODUCING AN ORGANISED NETWORK OF SEMICONDUCTOR NANOWIRES MADE OF ZNO |
摘要 |
<p>A method of forming an organized network of ZnO nanowires including the steps of obtaining, on a substrate, a ZnO layer of Zn polarity, by epitaxial growth at low temperature, advantageously in the range from 400° C. to 650° C., and advantageously in the presence of dioxygen (O2); forming, on this layer, a mask provided with openings for the subsequent growth of nanorods; epitaxially growing ZnO nanorods.</p> |
申请公布号 |
EP2769416(A2) |
申请公布日期 |
2014.08.27 |
申请号 |
EP20120787788 |
申请日期 |
2012.10.19 |
申请人 |
COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES |
发明人 |
THIERRY, ROBIN;FERRET, PIERRE;LAFOSSAS, MATTHIEU;PERILLAT-MERCEROZ, GUILLAUME |
分类号 |
H01L29/22;B82Y10/00;B82Y30/00;B82Y40/00;H01L21/02;H01L29/06;H01L33/00;H01L33/18 |
主分类号 |
H01L29/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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