VAPOR DEPOSITION APPARATUS AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS

摘要

The present invention relates to a vapor deposition apparatus in order to form a deposition layer on a plate for preventing contamination of depositing space efficiently and improving a feature of a deposition layer easily, comprising a plasma generating part in order for some of a first raw material gas to be transformed into a radical form; a corresponding face corresponding to the plasma generating part; a reacting room formed between the plasma generating part and the corresponding face; and an insulating member formed to keep a certain distance from the plasma generating part and to wrap the plasma generating part, and to a vapor deposition method using the vapor deposition apparatus and a method for manufacturing an organic light emitting display apparatus.