LASER PROCESSING MACHINE

摘要

A processing machine is configured to include mirrors 112 and 122 to reflect a beam L oscillated from a laser oscillator to a predetermined surface 4 on which a workpiece is arranged, optical axis operating mechanisms 111 and 121 to position an optical axis of the beam L at a desired target irradiation position by changing directions of the mirrors 112 and 122, a camera sensor to capture an image of the target irradiation position and its periphery reflected in the mirror 122, and an error calibration mechanism to detect an error between the target irradiation position instructed to the optical axis operating mechanisms 111 and 121 and an actual position of the optical axis of the beam L in the predetermined surface 4 by referring to the image captured by the camera sensor. A correction amount to be instructed to the optical axis operating mechanisms 111 and 121 is determined based on the error in order to irradiate the target irradiation position with the beam L during processing.