DETECTING METHOD OF DEFECT OF BARRIER FILM AND DETECTING APPARATUS OF DEFECT OF BARRIER FILM FOR FLAT PANEL DISPLAY DEVICE

摘要

The present invention relates to a method for detecting defects of a barrier film comprising the steps of preparing a unit including an electrode and a barrier film covering the electrode; bringing a charged medium in contact with the surface of the barrier film; and measuring the change of current flow between the conducted medium and the electrode, and to a device for detecting defects of the barrier film.