发明名称 |
Deposition method using sealed replenishment container |
摘要 |
<p>A method for vaporizing particulate material and depositing it onto a surface to form a layer, includes providing a supply of particulate material in a replenishment container, the replenishment container having a sealed interface fitting; mounting the replenishment container to a supply hopper defining at least one feed opening, and breaking the seal at the interface fitting; transferring particulate material from the replenishment container to the supply hopper; and transferring such particulate material through the feed opening along a feeding path to a vaporization zone where at least a component portion of the particulate material is vaporized and delivered to the surface to form the layer.</p> |
申请公布号 |
EP1971702(B1) |
申请公布日期 |
2014.08.27 |
申请号 |
EP20060836748 |
申请日期 |
2006.11.01 |
申请人 |
GLOBAL OLED TECHNOLOGY LLC |
发明人 |
BOROSON, MICHAEL LOUIS;BRANDT, E. STEVEN |
分类号 |
C23C14/24 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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