发明名称 |
HEAT-TYPE FLOW METER |
摘要 |
Provided is a compact thermal type flowmeter that can perform a partial thermal treatment on a sensor element portion without affecting other elements and can improve the reliability of a sensor element while improving the sensitivity of the sensor element. A thermal type flowmeter includes a hollow portion which is formed in a semiconductor substrate, a thin film portion which is formed by insulating films provided to cover the hollow portion and, a heating resistor body and a temperature-measuring resistor body which are formed between the insulating films. In a method for manufacturing the thermal type flowmeter, a thermal treatment is performed to grow a crystal grain size of the heating resistor body and a crystal grain size of the temperature-measuring resistor body by heating the thin film portion after forming the thin film portion. |
申请公布号 |
EP2682720(A4) |
申请公布日期 |
2014.08.27 |
申请号 |
EP20110859960 |
申请日期 |
2011.03.02 |
申请人 |
HITACHI AUTOMOTIVE SYSTEMS, LTD. |
发明人 |
NAKANO, HIROSHI;MATSUMOTO, MASAHIRO;ASANO, SATOSHI;HANZAWA, KEIJI |
分类号 |
G01F1/692;G01F1/684;G01F5/00;H01L29/66 |
主分类号 |
G01F1/692 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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