Polymer film as an interstitial fill for PZT printhead fabrication

摘要

A method and structure for an ink jet printhead, and a printer including the ink jet printhead. The printhead can include a polymer as a film spacer which separates an electrical interconnect such as a printed circuit board or a flexible circuit from a printhead diaphragm, such that the film spacer is interposed between the electrical interconnect and the diaphragm. In an embodiment, a piezoelectric actuator is free from contact with the film spacer. Embodiments of a process for forming the printhead may have reduced processing stages requiring fewer manufacturing tools than some other processes. Embodiments of the resulting printhead and printer may have fewer structural components than some other printheads and printers.

主权项

1. An ink jet printhead, comprising:
a diaphragm comprising a plurality of openings therethrough, a first side, and a second side opposite the first side; a piezoelectric actuator array, wherein each piezoelectric actuator within the printhead is attached to the first side of the diaphragm; a pre-formed film spacer attached to the first side of the diaphragm at locations directly between adjacent piezoelectric actuators, wherein the pre-formed film spacer comprises a polymer layer and does not directly overlie the plurality of actuators; an electrical interconnect electrically coupled to the plurality of actuators, wherein the film spacer and the plurality of piezoelectric actuators are directly interposed between the diaphragm and the electrical interconnect in a direction perpendicular to the first side of the diaphragm; and an aperture plate comprising a plurality of nozzles, wherein the second side of the diaphragm is at a level interposed between each piezoelectric actuator within the printhead and the aperture plate.