Resonator element and resonator having a tapered arm next to the base

摘要

A resonator element includes: at least one resonating arm which performs flexural vibration; a base portion connected to an end of the resonating arm; and a tapered portion which is axisymmetrical with respect to a centerline which bisects the width of the resonating arm, and which has a width increasing toward a portion of the tapered portion connected to the base portion from a portion of the tapered portion connected to the resonating arm, wherein assuming that the length and width of the resonating arm are L and W and the length and width of the tapered portion are Lt and Wt, the shape of the tapered portion is controlled to satisfy a taper length occupancy η=Lt/L and a taper width occupancy ξ=2Wt/W.

主权项

1. A resonator element comprising:
at least one resonating arm which performs flexural vibration; a base portion connected to an end of the resonating arm; and a tapered portion which is provided along the resonating arm and the base portion, and which has a width increasing toward a first end portion of the tapered portion connected to the base portion from a second portion of the tapered portion connected to the resonating arm, wherein the length and width of the resonating arm are L and W and the length and width of the tapered portion at the first end portion are Lt and Wt, the shape of the tapered portion is controlled to satisfy the following first and second ranges, here a taper length occupancy η=Lt/L and a taper width occupancy ξ=2Wt/W, and a Q factor of the resonator element with the tapered portion is Q and a Q factor of the resonator element without the tapered portion is Q0, when the first range of the taper length occupancy η is 0.0504≦η≦0.1260 the taper width occupancy ξ is in the second range of 5.191×101η2−6.959η+4.339×10−11≦ξ≦−9.160×101η2+1.899×101η−4.679×10−1 so that a value of Q/Q0 that is equal to or more than 1.3 is obtained, and the shape of the tapered portion is formed by a straight line or a curved line extending between the first and second end portions.