发明名称 |
Techniques for handling media arrays |
摘要 |
Techniques for handling media arrays are disclosed. The techniques may be realized as a system for handling a plurality of substrates. The system may comprise a plurality of row elements for supporting the plurality of substrates, wherein the plurality of row elements may be operable to change configuration of the substrates from open configuration to a high-density configuration, where a distance between adjacent substrates in the open configuration may be greater than a distance between the adjacent substrates in the high-density configuration. |
申请公布号 |
US8814239(B2) |
申请公布日期 |
2014.08.26 |
申请号 |
US201213397441 |
申请日期 |
2012.02.15 |
申请人 |
Varian Semiconductor Equipment Associates, Inc. |
发明人 |
Forderhase Paul;Blake Julian;Weaver William |
分类号 |
H01L21/683;A47B81/00 |
主分类号 |
H01L21/683 |
代理机构 |
|
代理人 |
|
主权项 |
1. A system for handling a plurality of substrates, the system comprising:
a plurality of row elements, disposed adjacent to one another, for supporting the plurality of substrates, wherein each of the row elements comprises a plurality of posts, each post holding a respective substrate, and wherein the plurality of row elements are operable to change configuration of the substrates from an open configuration to a high-density configuration, wherein a distance between substrates disposed on adjacent row elements in the open configuration is greater than a distance between the substrates disposed on the adjacent row elements in the high-density configuration. |
地址 |
Gloucester MA US |