发明名称 Techniques for handling media arrays
摘要 Techniques for handling media arrays are disclosed. The techniques may be realized as a system for handling a plurality of substrates. The system may comprise a plurality of row elements for supporting the plurality of substrates, wherein the plurality of row elements may be operable to change configuration of the substrates from open configuration to a high-density configuration, where a distance between adjacent substrates in the open configuration may be greater than a distance between the adjacent substrates in the high-density configuration.
申请公布号 US8814239(B2) 申请公布日期 2014.08.26
申请号 US201213397441 申请日期 2012.02.15
申请人 Varian Semiconductor Equipment Associates, Inc. 发明人 Forderhase Paul;Blake Julian;Weaver William
分类号 H01L21/683;A47B81/00 主分类号 H01L21/683
代理机构 代理人
主权项 1. A system for handling a plurality of substrates, the system comprising: a plurality of row elements, disposed adjacent to one another, for supporting the plurality of substrates, wherein each of the row elements comprises a plurality of posts, each post holding a respective substrate, and wherein the plurality of row elements are operable to change configuration of the substrates from an open configuration to a high-density configuration, wherein a distance between substrates disposed on adjacent row elements in the open configuration is greater than a distance between the substrates disposed on the adjacent row elements in the high-density configuration.
地址 Gloucester MA US