| 主权项 |
1. A method of processing of an object, wherein the method comprises:
a sequence, wherein the sequence comprises:
scanning a particle beam across a surface of the object and detecting electrons emerging from the object due to the scanning;determining a height difference between a predetermined surface and the surface of the object for each of a plurality of locations of the predetermined surface of the object based on the detected electrons;determining a processing intensity for each of the plurality of locations of the predetermined surface of the object based on the determined height differences; anddirecting a particle beam to the plurality of locations based on the determined processing intensities, in order to remove material from or deposit material on the object at the plurality of locations, wherein the sequence is repeatedly performed for each of the plurality of locations of the predetermined surface of the object, wherein the object is simultaneously located within a work area of a particle beam column generating the particle beam used for the scanning of the particle beam across the surface of the object and a work area of a particle beam column generating the particle beam used for the removing and the depositing of material, respectively, wherein an acute angle is formed between a main axis of the particle beam column generating the particle beam used for the scanning of the particle beam across the surface of the object and a main axis of a particle beam column generating the particle beam used for the removing and the depositing, respectively, and wherein an orientation of the object relative to the particle beam column used for the removing and depositing, respectively, is changed between the scanning of the particle beam and the removing and the depositing, respectively, by less than 0.5 times said acute angle. |
