主权项 |
1. An inspection jig that electrically connects an inspection target having a plurality of inspection points used as targets to be inspected and an inspection device inspecting electrical characteristics between the inspection points, the inspection jig comprising:
an electrode body having a plurality of electrode parts electrically connected with the inspection device; inspection contact elements electrically connecting the electrode parts with the inspection points; and a holder having a first plate-like member guiding one ends of the inspection contact elements toward the electrode parts and a second plate-like member guiding the other ends of the inspection contact elements toward the inspection points, and holding the inspection contact elements, wherein each inspection contact element includes
an outer tube whose one-end opening comes into contact with the second plate-like member, andan inner tube coaxially disposed inside the outer tube, and disposed to extend from the one-end opening of the outer tube, the outer tube includes
an outer lower tube part having a one-side opening coming into contact with the second plate-like member,a first notch part spatially connected with the other-side opening of the outer lower tube part, formed in a tubular shape of the same diameter as the outer lower tube part, and having a spiral notch in a wall of the tubular shape in a longitudinal direction, andan outer upper tube part formed in a tubular shape of the same diameter as the first notch part and spatially connected with the first notch part,the inner tube includesan inner lower tube part having a one-side opening electrically connected with the inspection point,a second notch part spatially connected with an other-side opening of the inner lower tube part, formed in a tubular shape of the same diameter as the inner lower tube part, and having a spiral notch in a tubular wall in a longitudinal direction, andan inner upper tube part formed in a tubular shape with the same diameter as the second notch part and spatially connected with the second notch part,the outer tube and the inner tube have a fixed part fixing the outer lower tube part and the inner lower tube part, andwhen the inner lower tube part of the inner tube comes into pressure-contact with the inspection point and inspection is carried out, the inner tube and the outer tube are sandwiched by the inspection point and the electrode body, and the first notch part and the second notch part are contracted. |