Two-dimensional comb-drive actuator and manufacturing method thereof

摘要

A two-dimensional comb-drive actuator and manufacturing method thereof are described. The two-dimensional comb-drive actuator includes a supporting base, a frame and a movable body. The supporting base has first comb electrodes and the frame has internal comb electrodes and external comb electrodes. The external comb electrodes of the frame are interdigitated to the first comb electrodes of the supporting base. The movable body has second comb electrodes which are interdigitated to the internal comb electrodes of the frame. The thicknesses of the second comb electrodes of the movable body are unequal to the internal comb electrodes of the frame and the external comb electrodes of the frame are unequal to the first comb electrodes of the supporting base. The two-dimensional comb-drive actuator utilizes a conducting layer for the above-mentioned comb electrodes in order to increase the rotation angle and operation frequency thereof.

主权项

1. A two-dimensional comb-drive actuator, comprising:
a supporting base having two sets of first comb electrodes; a frame connected to the supporting base and having two sets of internal comb electrodes and two sets of external comb electrodes, for rotating around a first rotational axis wherein the two sets of external comb electrodes are interdigitated to the two sets of first comb electrodes correspondingly; and a movable body connected to the frame and having two sets of second comb electrodes, for rotating around a second rotational axis which is perpendicular to the first rotational axis and interdigitated to the two sets of internal comb electrodes wherein along a specific direction perpendicular to the first and second rotational axes, a conducting layer is coated on a surface of at least one of the two sets of internal comb electrodes and the two sets of second comb electrodes, and on a surface of at least one of the two sets of first comb electrodes and the two sets of external comb electrodes, so that a comb electrode thickness of combing the conducting layer and at least one of the two sets of internal comb electrodes and the two sets of second comb electrodes is unequal to a thickness of each of the others of the two sets of internal comb electrodes and the two sets of second comb electrodes in the specific direction, and a comb electrode thickness of combing the conducting layer and at least one of the two sets of first comb electrodes and the two sets of external comb electrodes is unequal to a thickness of each of the others of the two sets of first comb electrodes and the two sets of external comb electrodes in the specific direction.