Nanowire efuses

摘要

Electrically programmable fuses and methods for forming the same are shown that include forming a wire between a first pad and a second pad on a substrate, forming a blocking structure around a portion of the wire, and depositing a metal layer on the wire and first and second pads to form a metal compound, wherein the metal compound fully penetrates the portion of the wire within the blocking structure.

主权项

1. An electrically programmable fuse, comprising:
a conducting wire connecting a first pad and a second pad disposed at respective ends of the conducting wire, the conducting wire having a completely silicide cross-section, such that the entire cross-section is formed from silicide, where the first pad and second pad provide an external electrical connection to the wire; and a blocking structure formed around a full circumference of a portion of the wire, wherein the blocking structure comprises a spacer, wherein the completely silicide cross-section is within the region covered by the blocking structure, and wherein the conducting wire is disposed entirely within the blocking structure, wherein the conducting wire is configured to break by electro-migration into two regions so as to produce an electrical open when a threshold electrical signal is applied across the first and second pads.