| 摘要 |
Parameter amplification of MEMS gyroscope by capacitance modulation is provided to prevent exposure of a pump signal of a parametric amplifier to a phase error of an electronic device by generating the capacitance modulation with drive kinematics of gyroscope mechanism. Parameter amplification of MEMS gyroscope by capacitance modulation includes an inertial mass(202), a sensing electrode, an electrical output part. The inertial mass has one or more inertial mass comb finger. The sensing electrode has or more sensing electrode comb finger separated from the comb finger of the inertial mass. The electrical output part outputs time-variable electrical output. The inertial mass comb finger comprises an end part of the inertial mass comb finger and a finger attaching part of the inertial mass. |
