METHOD OF MANUFACTURING A SEMICONDUCTOR LIGHT EMITTING DEVICE AND CHEMICAL VAPOR DEPOSITION APPARATUS

摘要

Provided is a method of manufacturing a semiconductor light emitting device which includes a step of forming a light emitting laminate by successively growing a first conductivity type semiconductor layer, an active layer, and a second conductivity type semiconductor layer on a substrate. The step of forming a light emitting laminate includes a first growth process which uses a first susceptor having the mounting surface of a first curvature, a second growth process which uses a second susceptor having the mounting surface of a second curvature which is different from the first curvature, and a transfer process which transfers the substrate from the first susceptor to the second susceptor between the first and the second growth process.