| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate control device in which a flow rate regulating valve of a dressing liquid and/or nozzle cleaning liquid can be easily operated while protecting a device arranged in the flow rate control device from a liquid such as a polishing liquid and the dressing liquid.SOLUTION: Polishing liquid transfer pipes 130, 131, 132, flow rate sensors 134, 135, 136 for measuring a flow rate of a polishing liquid flowing in the polishing liquid transfer pipes 130, 131, 132, a dressing liquid transfer pipe 110 in which a dressing liquid flows, and a dressing liquid flow rate regulating valve 112 which regulates a flow rate of the dressing liquid flowing in the dressing liquid transfer pipe 110 are arranged in a housing container 104. An opening part 104b is formed on the housing container 104 in a position corresponding to the dressing liquid flow rate regulating valve 112, and the housing container 104 includes a lid member 106 for covering the opening part 104b. |
