发明名称 FINE PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a fine processing device capable of preventing the occurrence of failure in processing due to a small-scale earthquake.SOLUTION: A fine processing device 100 includes: an earthquake detection section 8 detecting the start of an earthquake; and a processing suspension controller 9 suspending the processing treatment of the fine processing device 100 when the start of the earthquake is detected by the earthquake detection section 8. The processing treatment can be suspended at the point of the detection of the start of the earthquake, so that the processing treatment can be suspended even in the case of a small-scale earthquake. Thus, the occurrence of failure in processing due to the earthquake can be prevented.
申请公布号 JP2014153067(A) 申请公布日期 2014.08.25
申请号 JP20130020179 申请日期 2013.02.05
申请人 KURARAY CO LTD 发明人 UCHIDA ATSUSHI;WATANABE ATSUSHI;KARAI MASARU
分类号 G01V1/00;H01L21/02;H01L21/027 主分类号 G01V1/00
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