| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid droplet discharge head, capable of preventing occurrence of peeling between a wiring layer and an electrode layer due to a developer, securing a stable yield of an actuator substrate having high credibility, and achieving improvement in productivity and reduction in costs.SOLUTION: There is provided a method for manufacturing a liquid droplet discharge head including a nozzle board 300 in which multiple nozzle holes 6 are formed, a plurality of pressure liquid chambers 5 corresponding to the nozzle holes 6; a diaphragm 3 formed on a face opposed to the nozzle holes 6 of the pressure liquid chambers 5; an actuator in which a lower electrode 10, a piezoelectric crystal 12 and an upper electrode 11 are laminated in turn on the diaphragm 3; and a lead wiring 40 led from the lower electrode 10 and the upper electrode 11. In the method, the lead wiring 40 is formed by forming a lead wiring layer 40, patterning a protection layer 46 on the lead wiring layer 40, and patterning the lead wiring layer 40 through etching. |
