HEATING DEVICE WITH ELECTRON BEAM PERMEABLE MEMBRANE

摘要

PROBLEM TO BE SOLVED: To provide a heating device with an electron beam permeable membrane, capable of controlling temperatures. ! SOLUTION: A heating device 100 with an electron beam permeable membrane for use in an electron microscope comprises: a substrate 10 provided with a through hole 12; a barrier membrane 20 provided in a region overlapping with the through hole 12 and allowing an electron beam EB to transmit therethrough; a heating part 30 disposed to face the barrier membrane 20 with a space therebetween; and a support 40 provided on the substrate 10 and supporting the heating part 30. ! COPYRIGHT: (C)2014,JPO&INPIT