| 摘要 |
PROBLEM TO BE SOLVED: To cool an optical element. ! SOLUTION: When the backside of a plurality of elements 41 is brought close to the front side of a cold heat source, i.e., a base plate 420, by means of a mirror drive system (actuator 42), the backside of a plurality of elements 41 is also sucked to the front side of the base plate 420, by means of a mirror cooling system (electrodes 511, 512). Consequently, contact heat transfer coefficient of the elements 41 and base plate 420 increases, and the plurality of movable elements 41 used in vacuum can be cooled. ! COPYRIGHT: (C)2014,JPO&INPIT |
