ENERGY LINE DETECTION ELEMENT OF BACK-ILLUMINATED TYPE

摘要

PROBLEM TO BE SOLVED: To provide an energy line detection element of a back-illuminated type capable of relaxing the stress occurring in a protective film.SOLUTION: An energy line detection element 1 of a back-illuminated type comprises a semiconductor substrate 11 and a protective film 21. The semiconductor substrate 11 includes a first principal surface 11a as an incident surface of an energy line and a second principal surface 11b facing the first principal surface 11a. A charge generating region 13 which generates charge according to incidence of an energy line is provided on the second principal surface 11b side. The protective film 21 is provided on the second principal surface 11b side of the semiconductor substrate 11 so as to cover at least the charge generating region 13, and includes a silicon nitride or a silicon nitride oxide. The protective film 21 also includes a stress relaxation unit 23 which relaxes the stress occurring in the protective film 21.