| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity detector capable of detecting a minutely small physical quantity at high resolution. ! SOLUTION: A physical quantity detector includes a detection part which has a first diaphragm part 11 to which a first electrode part 12 is provided, and a second diaphragm part 21 to which a second electrode part 22 is provided and which is arranged in a manner to face the first diaphragm part 11 with a cavity 20 between the first and second diaphragm parts 11, 21. ! COPYRIGHT: (C)2014,JPO&INPIT |
