MANUFACTURING METHOD OF ACTUATOR, ACTUATOR, DROPLET DISCHARGE HEAD, INK CARTRIDGE, AND IMAGE FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To improve crystal orientation of a piezoelectric film to obtain an actuator having excellent piezoelectric characteristics.SOLUTION: A manufacturing method of an actuator includes the steps of: forming a silicon oxide film 14 by an LPCVD method as a thin film of an uppermost layer of a diaphragm 15, and subsequently irradiating the surface of the silicon oxide film 14 with oxygen plasma using an ICP etcher, so as to form a surface modification layer 14a comprising the silicon oxide film; and then forming a piezoelectric element comprising a lower electrode 16, a piezoelectric film 17, and an upper electrode 18 on the surface modification layer 14a.