OPTICAL SEMICONDUCTOR ELEMENT AND METHOD OF MANUFACTURING OPTICAL SEMICONDUCTOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an optical semiconductor element that allows forming a plurality of optical elements on the same semiconductor substrate with high reliability by using a regrowth process of a semiconductor material.SOLUTION: The optical semiconductor element includes: a semiconductor substrate 10; a semiconductor active layer 11 grown on the semiconductor substrate 10; a dislocation induction layer 13 grown above an upper portion of the semiconductor layer 11 with reference to the semiconductor substrate 10 and having the amount of stress larger than that of the semiconductor active layer 11; and an optical waveguide layer 31 in which an optical signal is transmitted between the semiconductor active layer 11 and the optical waveguide layer 31. The optical waveguide layer 31 is butt-connected to the semiconductor active layer 11 by being regrown so as to be in contact with a mesa surface 11a formed on the semiconductor active layer 11, and the dislocation induction layer 13 induces dislocations occurring in a regrowth interface that is butt-connected.