ULTRAVIOLET LIGHT IRRADIATION DEVICE

摘要

PROBLEM TO BE SOLVED: To irradiate a protective tape stuck to an annular protrusion with ultraviolet light efficiently and economically.SOLUTION: An ultraviolet light irradiation device 2 is constituted of a housing 21, ultraviolet light irradiation means 22, and a douser 23. The housing 21 is open upward. The ultraviolet light irradiation means 22 is arranged in the housing 21 in ring-shape corresponding to the annular protrusion of a wafer. The ultraviolet light irradiation means 22 is formed by arranging a plurality of ultraviolet light emitting diodes 24 in ring-shape equivalent to the size of the annular protrusion of a wafer. The douser 23 includes an ultraviolet light transmission part 25 of ring-shape having a size equivalent to the annular protrusion of a wafer.