| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement detection device which can detect low acceleration without the increase in size of a mass body and which achieves easy processing, and a manufacturing method of the displacement detection device.SOLUTION: A manufacturing method of an acceleration switch comprises: a recess forming step of forming a recess 21 at a position corresponding to a bottom face of a mass body 2 in a silicon wafer 100; a filling step of filling the recess 21 formed at the recess forming step with a filling 22 having higher density than a material making the silicon wafer 100; and an abrading step of abrading the whole bottom face of the silicon wafer 100 so that the silicon wafer 100 has the same height as the mass body 2 and a frame 4. |
