发明名称 MARKING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a marking device in which the interval between the tip of an inker and a marking object, i.e., a substrate, can be adjusted easily and quickly without relying upon the skill level of a worker.SOLUTION: A marking device 1 includes a stage 3 for mounting a substrate W, an inker 10 for marking the substrate W with ink discharged from a discharge port 11a, a camera 5 for imaging the vicinity of the discharge port 11a, arranged in close vicinity of the substrate W by movement mechanisms 4, 13 for moving the stage 3 and the inker 10 relatively, from the side of the substrate W, and positioning means 20, 21 for adjusting the interval between the discharge port 11a and the substrate W to a predetermined interval for marking the substrate W, by moving at least one of the inker 10 and stage 3 by means of the movement mechanisms 4, 13, based on an image captured by means of the camera 5 and displayed on a monitor 6.
申请公布号 JP2014154711(A) 申请公布日期 2014.08.25
申请号 JP20130023417 申请日期 2013.02.08
申请人 DENSO CORP 发明人 UCHIMURA TERUHIKO
分类号 H01L21/02 主分类号 H01L21/02
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