| 摘要 |
PROBLEM TO BE SOLVED: To suppress variations in discharge characteristics due to an adhesive protruding from a junction when a holding substrate is joined to a piezoelectric element substrate with an adhesive. ! SOLUTION: A vibration plate 203 and an actuator element 201 are laminated on a substrate 200a forming a partition wall 207 of an ink liquid chamber 202 to be integrated to form an actuator substrate 200. A sub frame substrate 400 is joined to an area facing the partition wall on which the actuator element is not laminated, of the actuator substrate 200, using an adhesive. A protrusion 210 is provided between a place to which the sub frame substrate of the actuator substrate is joined and an area on which the actuator element is laminated. ! COPYRIGHT: (C)2014,JPO&INPIT |
