| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample holder in which substrate holding members may be mounted on a mounting surface stably when the substrate holding members are mounted and removed repeatedly.SOLUTION: A sample holder stored in a plasma treatment apparatus has a plurality of substrate holding members comprising: a substrate plate having a mounting surface extended vertically for mounting the substrate to be treated; annular shanks structured so that cylindrical cavities are formed in their respective interior; an outer shell part consisting of a head part having a cross sectional area larger than those of the shanks; and a core part of columnar shape disposed in close contact with the inner walls of the shanks of the outer shell part, in which a part of the shanks are embedded in the mounting surface and the substrate is supported by the shanks at gaps between the head parts of the substrate holding members and the mounting surface. |
